MEMS Handler (4664-IH)

 

4664-IH     MEMS Handler

The ULTRA P is a high performance production handler that provides thermal conditioning, full 6 DOF mechanical stimulus and an electrical ATE signal path for testing Micro-Electro-Mechanical Systems (MEMS) Accelerometers and Gyroscopes.   

The system is intended for high volume device manufacturing test, allowing up to 96 devices to be tested in parallel, but may also be used for verification, validation, and device  engineering tasks.   

The ULTRA P is a revolutionary step forward in device handling, thermal, mechanical stimulus and electrical signal performance.   

 

 

4664-IH 3

 

FEATURES
High UPH & Parallel Test Count
Thermal Accuracy / Stability
Aerospace Grade Rate / Position
Signal Path Fidelity / Bandwidth
Quick & Easy Change Kits
Full 6 DOF Test Capability
Magnetic Test Option
Package Type: LGA, BGA, CSP
Package Size: 2x2mm or larger
UPH: 20,000~ at Ambient or Temp.

 

 

 

 

ULTRA P

Feature

Details

Input / Output

JEDEC Tray

16 x Pick & Place Input / Output

Carrier 

Size

136mm x 136mm x 5mm
5.35” x  5.35” x  0.20”

Device Pockets

  2 to 96

Thermal Chamber

Temp Range

  -40°C to +125°C, standard
  -55°C to +150°C, option

Resolution

 0.1°C

Accuracy

±1°C

Stability

±0.1°C

Heat Source

Electric Coil, 5200 watts

Cold Source

LN2, 20-40 PSI

TEMP Control

PID Controller

Temp Measure

User and Chamber Sensors

Rate Stimulus 

Primary Axis

-360° to +360°

Secondary Axis

0° to +90°

Third Axis

0° to +90°

 Constant Mode

Accuracy

±15 Arc Seconds (.005°)

Repeatability

±5 Arc Seconds (.001°)

Rate Range

.0005º/Sec² to 1000º/Sec²

Rate Accuracy

±0.01% of programmed value

 Sinusoidal 

Acceleration

2,000º/Sec²

Speed Range

10 to 500º / second

Freq Range

 1 to 20Hz

DUT IO 

Number of Lines

400 standard, 50Ω
800 optional,  50Ω

Bandwidth

1.5GHz

 

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